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Characterization of low dielectric constant amorphous carbon nitride films

โœ Scribed by M Aono; S Nitta; T Katsuno; T Itoh; S Nonomura

Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
154 KB
Volume
159-160
Category
Article
ISSN
0169-4332

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โœฆ Synopsis

ลฝ

. Amorphous carbon nitride a-CN films have rather high resistivity and low dielectric constants that could be applied as x low dielectric constant materials. Several properties of a-CN films including interactions with metal electrodes are studied x and discussed using data from the frequency dependence of capacitance, Raman and photoluminescence spectra.

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## Abstract A technique for the characterization of microwave dielectric properties of high dielectric constant thick films at room temperature is proposed, using multilayered coplanar waveguide transmission lines with high dielectric constant thick films deposited over the lines.Besides the simpli