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Spectroscopic ellipsometry characterization of amorphous aluminum nitride and indium nitride thin films

✍ Scribed by Jebreel M. Khoshman; Martin E. Kordesch

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 209 KB
Volume: 2
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200461331

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