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In-situ spectroscopic ellipsometry to control the growth of Ti nitride and carbide thin films

✍ Scribed by S. Logothetidis; I. Alexandrou; J. Stoemenos

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 379 KB
Volume: 86
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)00392-0

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