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Microstructural Studies of Copper Incorporated Amorphous Carbon Nitride Films

✍ Scribed by Jiang, Liudi ;Fitzgerald, A.G. ;Rose, M.J.

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 114 KB
Volume: 189
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200201)189:1<203::aid-pssa203>3.0.co;2-d

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