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Synthesis and characterization of amorphous carbon nitride films

✍ Scribed by B.C. Holloway; D.K. Shuh; M.A. Kelly; W. Tong; J.A. Carlisle; I. Jimenez; D.G.J. Sutherland; L.J. Terminello; P. Pianetta; S. Hagstrom

Book ID: 114086158
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 314 KB
Volume: 290-291
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(96)09203-6

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