✦ LIBER ✦

The characteristics before and after annealing of amorphous silicon films prepared by ECR plasma CVD

✍ Scribed by Moonsang Kang; Jaeyeong Kim; Taehoon Lim; Inhwan Oh; Bupju Jeon; Ilhyun Jung; Chul An

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Annealing behavior of silicon nitride an

✍ Takeshi Kamada; Takashi Hirao; Masatoshi Kitagawa; Kentaro Setsune; Kiyotaka Was 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 262 KB

The structure and tribological property

✍ Ohana, T; Goto, A; Yamamoto, K; Nakamura, T; Tanaka, A; Osawa, Y; Yoda, H; Sahas 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 205 KB

Preparation of hydrogenated amorphous si

✍ Yutaka Tsujiuchi; Junya Suto; Kenji Goto; Shigeki Shibata; Tadashi Ishimaru; Man 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 400 KB

Effect of rapid thermal annealing on the

✍ Jong-Wha Kim; Do-Oh Kim; Yoon-Bong Hahn 📂 Article 📅 1998 🏛 Springer US 🌐 English ⚖ 810 KB

Effect of hydrogen dilution on the optic

✍ Yamaguchi, Masaaki; Morigaki, Kazuo 📂 Article 📅 2003 🏛 Taylor and Francis Group 🌐 English ⚖ 598 KB

Real-time spectroscopic ellipsometry stu

✍ Layadi, N.; Roca i Cabarrocas, P.; Drévillon, B.; Solomon, I. 📂 Article 📅 1995 🏛 The American Physical Society 🌐 English ⚖ 521 KB