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Effect of rapid thermal annealing on the structural and electrical properties of TiO2thin films prepared by plasma enhanced CVD

✍ Scribed by Jong-Wha Kim; Do-Oh Kim; Yoon-Bong Hahn

Book ID
110643826
Publisher
Springer US
Year
1998
Tongue
English
Weight
810 KB
Volume
15
Category
Article
ISSN
0256-1115

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