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Effect of hydrogen dilution on the optical properties of hydrogenated amorphous silicon-nitrogen films prepared by plasma deposition

โœ Scribed by Yamaguchi, Masaaki; Morigaki, Kazuo


Book ID
126826731
Publisher
Taylor and Francis Group
Year
2003
Tongue
English
Weight
598 KB
Volume
83
Category
Article
ISSN
1478-6435

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