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The bending of silicon wafers by thin polycrystalline silicon film deposition and by film doping using boron diffusion

✍ Scribed by L.T. Toncheva; I.S. Vassilev

Book ID
107862575
Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
649 KB
Volume
60
Category
Article
ISSN
0040-6090

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