A pulsed Nd:YAG Laser was used to evaporate solid targets of KTiOAsO 4 (KTA) at power densities of 0.6 to 2.0×10 9 W/cm 2 . KTA thin films were deposited on glass, Si (100). After proper annealing treatment, single phase, (orthorh-ombic) polycrystalline KTA thin films were obtained. Some propitious
Preparation of Boron–Silicon Thin Film by Pulsed Laser Deposition and Its Properties
✍ Scribed by Masatoshi Takeda; Masahiro Ichimura; Hideshi Yamaguchi; Yoshiko Sakairi; Kaoru Kimura
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 133 KB
- Volume
- 154
- Category
- Article
- ISSN
- 0022-4596
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✦ Synopsis
Boron+silicon amorphous 5lms were prepared by pulsed laser deposition technique. Band gap was estimated from the optical absorption spectrum for the 5lms, and it increased with increasing silicon concentration. The values and concentration dependence of the band gap are nearly the same as those measured for amorphous B+Si prepared by electron beam evaporation. Electrical (dc) conductivity of the 5lms was two or three orders of magnitude larger than that of amorphous boron, and its temperature dependence reveals variable-range-hopping-type behavior (Mott:s low). Concentration dependence of the dc conductivity is similar to that of metal-doped -rhombohedral boron. 2000 Academic Press
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