Crystalline lattice phase-conversion on thin boron nitride films deposited on silicon wafers by an ion beam assisted deposition method

✍ Scribed by Katsuhiro Yokota; Hidekazu Kimura; Fumiyoshi Miyashita

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 232 KB
• Volume: 257
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2007.01.097