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Ion beam current dependence of compositions and resistivities on titanium nitride films deposited onto silicon by an ion beam assisted deposition method

✍ Scribed by Katsuhiro Yokota; Tomohiko Kasuya; Kazuhiro Nakamura; Masami Ohnishi; Fumiyoshi Miyashita

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 122 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.171

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