✦ LIBER ✦
A study of the stress and resistivity of Al/Ti films deposited by an ion beam assisted process for surface acoustic wave devices applications
✍ Scribed by D.M. Li; X.B. Wang; F. Pan
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 323 KB
- Volume
- 418
- Category
- Article
- ISSN
- 0921-5093
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