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Nitrogen ion energy dependencies of dielectric constants and compositions of barium carbide–barium nitrate mixed films deposited on silicon wafers by an ion beam assisted deposition technique

✍ Scribed by Katsuhiro Yokota; Yuuki Teramoto; Fumiyoshi Miyashita

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 604 KB
Volume: 257
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.066

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