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The Aerosol-Assisted CVD of Silver Films from Single-Source Precursors

✍ Scribed by Arunkumar Panneerselvam; Mohammad A. Malik; Paul O'Brien; Madeleine Helliwell

Publisher: John Wiley and Sons
Year: 2009
Tongue: English
Volume: 15
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200806729

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✦ Synopsis

Abstract

Thin films of silver are deposited from tetraphenyldioxoimidodiphosphinato silver(I) [Ag{(OPPh~2~)~2~N}]~4~ · 2H~2~O (1) and silver(I) triflouoroacetate CF~3~COOAg (2) single‐source precursors (SSPs) by the aerosol‐assisted (AA)CVD method. The complex (1) is a tetramer with linear and distorted tetrahedral coordination modes at silver. Two types of films, silvery and brownish, are observed from both SSPs due to the temperature gradient in the AACVD reactor. The as‐deposited films are characterized by X‐ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X‐ray (EDX) analysis, and ultraviolet/visible (UV‐vis) spectroscopy methods.

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