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Growth of Ultrathin Films of Amorphous Ruthenium—Phosphorus Alloys Using a Single Source CVD Precursor.

✍ Scribed by Jinhong Shin; Abdul Waheed; Kyriacos Agapiou; Wyatt A. Winkenwerder; Hyun-Wu Kim; Richard A. Jones; Gyeong S. Hwang; John G. Ekerdt

Publisher: John Wiley and Sons
Year: 2007
Weight: 12 KB
Volume: 38
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200713216

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