Deposition of Thin Films of Gallium Sulfide from a Novel Liquid Single-Source Precursor, Ga(SOCNEt2)3, by Aerosol-Assisted CVD

✍ Scribed by G. A. Horley; M. R. Lazell; P. O'Brien

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 279 KB
• Volume: 5
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/(sici)1521-3862(199910)5:5<203::aid-cvde203>3.0.co;2-l