Template fabrication schemes for step and flash imprint lithography

✍ Scribed by T.C. Bailey; D.J. Resnick; D. Mancini; K.J. Nordquist; W.J. Dauksher; E. Ainley; A. Talin; K. Gehoski; J.H. Baker; B.J. Choi; S. Johnson; M. Colburn; M. Meissl; S.V. Sreenivasan; J.G. Ekerdt; C.G. Willson

• Book ID: 114155397
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 586 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00462-8