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Squeeze time investigations for step and flash imprint lithography

✍ Scribed by Sander F. Wuister; Jeroen H. Lammers; Yvonne W. Kruijt-Stegeman; Leendert van der Tempel; Frits Dijksman

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 301 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.11.093

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