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Design of orientation stages for step and flash imprint lithography

✍ Scribed by B.J. Choi; S.V. Sreenivasan; S. Johnson; M. Colburn; C.G. Wilson

Book ID: 108400569
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 700 KB
Volume: 25
Category: Article
ISSN: 0141-6359
DOI: 10.1016/s0141-6359(01)00068-x

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