✦ LIBER ✦
Fabrication of step and flash imprint lithography templates using a variable shaped-beam exposure tool
✍ Scribed by William J. Dauksher; David Mancini; Kevin Nordquist; Douglas J. Resnick; Peter Hudek; Dirk Beyer; Tim Groves; Olaf Fortagne
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 661 KB
- Volume
- 75
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.