Fabrication of multi-tiered structures on step and flash imprint lithography templates

✍ Scribed by S. Johnson; D.J. Resnick; D. Mancini; K. Nordquist; W.J. Dauksher; K. Gehoski; J.H. Baker; L. Dues; A. Hooper; T.C. Bailey; S.V. Sreenivasan; J.G. Ekerdt; C.G. Willson

• Book ID: 114155518
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 812 KB
• Volume: 67-68
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(03)00075-3