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Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

โœ Scribed by J. Kettle; R.T. Hoyle; S. Dimov; R.M. Perks


Book ID
104051842
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
422 KB
Volume
85
Category
Article
ISSN
0167-9317

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Development and validation of functional
โœ J. Kettle; P. Coppo; G. Lalev; C. Tattershall; S. Dimov; M.L. Turner ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 515 KB

A formulation including dissolved phosphorescent iridium complex has been synthesised as a resist for step and flash imprint lithography (S-FIL TM ). Functional properties of the resist after curing are demonstrated and structures as small as 50 nm have been successfully imprinted with this material