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Simulating fabrication and imprinting distortions in step-and-flash imprint lithography templates

✍ Scribed by A.Y. Abdo; L. Zheng; A. Wei; A. Mikkelson; G. Nellis; R.L. Engelstad; E.G. Lovell

Book ID: 113797590
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 348 KB
Volume: 73-74
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.02.034

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