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Temperature dependence of interstitial oxygen diffusion in antimony-doped Czochralski silicon

✍ Scribed by Oates, A. S.; Lin, W.

Book ID: 120371978
Publisher: American Institute of Physics
Year: 1988
Tongue: English
Weight: 550 KB
Volume: 53
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.100186

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