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Oxygen diffusion and precipitation in Czochralski silicon

✍ Scribed by Newman, R C

Book ID: 111671949
Publisher: Institute of Physics
Year: 2000
Tongue: English
Weight: 291 KB
Volume: 12
Category: Article
ISSN: 0953-8984
DOI: 10.1088/0953-8984/12/25/201

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