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Simulation of oxygen precipitation in Czochralski grown silicon

✍ Scribed by M. Schrems; T. Brabec; M. Budil; H. Pötzl; E. Guerrero; D. Huber; P. Pongratz


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
455 KB
Volume
4
Category
Article
ISSN
0921-5107

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