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Electrical characteristics of oxygen precipitation related defects in Czochralski silicon wafers

✍ Scribed by F.G. Kirscht; Y. Furukawa; W. Seifert; K. Schmalz; A. Buczkowski; S.B. Kim; H. Abe; H. Koya; J. Bailey


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
483 KB
Volume
36
Category
Article
ISSN
0921-5107

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