Investigation of oxygen precipitation related crystal defects in processed silicon wafers by infrared light scattering tomography

✍ Scribed by G. Kissinger; J. Vanhellemont; E. Simoen; C. Claeys; H. Richter

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 357 KB
• Volume: 36
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(95)01371-7