Electrical characterization of crystal defects and oxygen in czochralski silicon using a gate-controlled diode

✍ Scribed by Y. Matsuoka; K. Ikuta

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 818 KB
• Volume: 24
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(81)90129-5