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Oxygen precipitates in short-time annealed Czochralski silicon

✍ Scribed by A. Borghesi; B. Pivac; A. Sassella

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 653 KB
Volume: 126
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(93)90226-m

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