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Effect of carbon on oxygen precipitation in Czochralski silicon

✍ Scribed by C. A. Londos; M. S. Potsidi; V. V. Emtsev

Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
174 KB
Volume
2
Category
Article
ISSN
1862-6351

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Effect of annealing atmosphere on oxygen
Effect of annealing atmosphere on oxygen precipitation and formation of denuded zone in Czochralski silicon wafer
✍ Cui, Can ;Yang, Deren ;Ma, Xiangyang ;Fan, Ruixin ;Que, Duanlin πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 282 KB

## Abstract In this paper, the effect of annealing atmosphere on oxygen precipitation and formation of denuded zone (DZ) in Czochralski (CZ) silicon has been investigated. It was revealed that the high‐temperature annealings in various atmospheres resulted in almost identical oxygen outdiffusion le