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Oxygen precipitation and microdefects in Czochralski-grown silicon crystals

✍ Scribed by Yasutake, K. ;Umeno, M. ;Kawabe, H.

Publisher: John Wiley and Sons
Year: 1984
Tongue: English
Weight: 709 KB
Volume: 83
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210830122

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