Oxygen precipitation in nitrogen-doped Czochralski-grown silicon crystals

✍ Scribed by Nakai, Katsuhiko; Inoue, Yoshiharu; Yokota, Hideki; Ikari, Atsushi; Takahashi, Jun; Tachikawa, Akiyoshi; Kitahara, Kouichi; Ohta, Yasumitsu; Ohashi, Wataru

• Book ID: 111671853
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 908 KB
• Volume: 89
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1356425