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Nano-scale analysis of precipitates in nitrogen-doped Czochralski silicon

✍ Scribed by G.A. Rozgonyi; A. Karoui; A. Kvit; G. Duscher

Book ID: 108411258
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 874 KB
Volume: 66
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(02)00923-1

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