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T-gate and airbridge fabrication for MMICs by combining multi-voltage electron-beam lithography and ion-beam lithography

✍ Scribed by R.G. Woodham; R.M. Jones; D.G. Hasko; J.R.A. Cleaver; H. Ahmed

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
360 KB
Volume
17
Category
Article
ISSN
0167-9317

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