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Electron beam lithography and ion implantation techniques for fabrication of high-Tc Josephson junctions

✍ Scribed by R. Barth; A.H. Hamidi; B. Hadam; J. Hollkott; D. Dunkmann; J. Auge; H. Kurz

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 605 KB
Volume: 30
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00274-x

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