✦ LIBER ✦
Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies V. PHILLIN D. BLAIS, Chairman/Editor. Proceedines of SPIE – The International Societv for Optical Engineerigg. Volume 632 (1986). Published by SPIE. Bellingham, Washington, USA: 1986. VI, 272 p., soft cover
✍ Scribed by G. Reinisch
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 175 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0323-7648
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