✦ LIBER ✦

Preparation of cross-sectional transmission electron microscopy samples by electron beam lithography and reactive ion etching

✍ Scribed by Wetzel, J. T.

Publisher: Wiley (John Wiley & Sons)
Year: 1989
Tongue: English
Weight: 764 KB
Volume: 11
Category: Article
ISSN: 0741-0581
DOI: 10.1002/jemt.1060110108

No coin nor oath required. For personal study only.

✦ Synopsis

TEM sample preparation, VLSI, semiconductor processing, Defect analysis A cross-sectional sample preparation technique is described that relies on lithographic and dry-etching processing, thus avoiding metallographic polishing and ion milling. The method is capable of producing cross-sectional transmission electron microscopy samples with a large amount of transparent area (1 pm x 2.5 mm) which allows the examination of many patterned test sites on the same sample from the same chip of a silicon wafer. An example of the application of the technique is given for localized oxidation through a mask.

📜 SIMILAR VOLUMES

Sample preparation technique for cross-s

Sample preparation technique for cross-sectional transmission electron microscopy of quantum wire structures

✍ Yu-Pei Chen; Jason D. Reed; Sean S. O'Keefe; William J. Schaff; Lester F. Eastma 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 363 KB 👁 1 views

A novel cross-sectional sample preparation technique for quantum wire (QWR) structures is described. By coating a thin layer of Au with a designed pattern on the sample as a marker to indicate the position of the wire pattern, the location of the thinned area can be controlled precisely. An example

Improved sample preparation for cross-se

Improved sample preparation for cross-sectional transmission electron microscopy of layered structures using rocking-angle ion-milling techniques

✍ Lee, Jeong Soo; Jeong, Young Woo; Kim, Sung Tae 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 735 KB

The rocking-angle ion-milling technique has been employed to produce optimum Pt/Ti/SiO,/Si, WITiN/Si021Si, and (Pb,La)TiO,/Pt/MgO samples for cross-sectional transmission electron microscopy (TEM). Because of the different ion-milling rates between film layers and substrate materials, no satisfactor

Technique for preparation and characteri

Technique for preparation and characterization in cross-section of oral titanium implant surfaces using focused ion beam and transmission electron microscopy

✍ Tobias Jarmar; Anders Palmquist; Rickard Brånemark; Leif Hermansson; Håkan Engqv 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 445 KB 👁 1 views

## Abstract The surface properties of materials are believed to control most of the biological reactions toward implanted materials. To study the surface structure, elemental distribution, and morphology, using transmission electron microscopy (TEM) techniques, thin foils of the surface (in cross‐s

The Cross-Sectional Structure of Vanadiu

The Cross-Sectional Structure of Vanadium Oxide Nanotubes Studied by Transmission Electron Microscopy and Electron Spectroscopic Imaging

✍ Frank Krumeich; Hans-Joachim Muhr; Markus Niederberger; Fabian Bieri; Reinhard N 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 German ⚖ 694 KB

The preparation of cross-sectional speci

The preparation of cross-sectional specimens of thin poorly adhered scales for transmission electron microscopy

✍ P. Fox 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 250 KB 👁 1 views

## INTRODUCTION. The high temperature oxidation of alumina-and chromia-forming metals and alloys has been studied for many years. Although it is fairly easy to produce TEM cross-sections of the adherent scales formed on alloys containing reactive elements it has proved more difficult to cross-sect

High-resolution transmission electron mi

High-resolution transmission electron microscopy investigations of a highly adhesive hydroxyapatite coating/titanium interface fabricated by ion-beam-assisted deposition

✍ Liu, J. Q. ;Luo, Z. S. ;Cui, F. Z. ;Duan, X. F. ;Peng, L.-M. 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 353 KB 👁 2 views