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Synthesis and characterization of fluorinated amorphous carbon films by reactive magnetron sputtering

✍ Scribed by Ishihara, M.; Suzuki, M.; Watanabe, T.; Nakamura, T.; Tanaka, A.; Koga, Y.

Book ID: 122008833
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 223 KB
Volume: 14
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2004.12.019

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