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Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering

✍ Scribed by Hyun S. Myung; Yong S. Park; Min J. Jung; B. Hong; Jeon G. Han

Book ID: 116730211
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 369 KB
Volume: 58
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2003.10.021

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