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The electrical and structural properties of the hydrogenated amorphous carbon films grown by close field unbalanced magnetron sputtering

✍ Scribed by Yong Seob Park; Hyun Sik Myung; Jeon Geon Han; Byungyou Hong


Book ID
108287734
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
491 KB
Volume
482
Category
Article
ISSN
0040-6090

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