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Electrical and structural properties of LiNbO3films, grown by RF magnetron sputtering

โœ Scribed by V. Iyevlev; A. Kostyuchenko; M. Sumets; V. Vakhtel


Publisher
Springer US
Year
2011
Tongue
English
Weight
384 KB
Volume
22
Category
Article
ISSN
0957-4522

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In this work we report on the results obtained on NbN x thin films grown on both common glass and silicon wafer substrates by RF magnetron sputtering at different substrate temperatures and different target power supplies. The crystalinity, morphology and surface composition of the deposited films h