Deposition of graded alloy nitride films by closed field unbalanced magnetron sputtering

✍ Scribed by D.P. Monaghan; D.G. Teer; K.C. Laing; I. Efeoglu; R.D. Arnell

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 650 KB
• Volume: 59
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(93)90049-t