✦ LIBER ✦
Deposition of Aluminium Nitride Film by Magnetron Sputtering for Diamond-Based Surface Acoustic Wave Applications
✍ Scribed by Mortet, V. ;Nesladek, M. ;D'Haen, J. ;Vanhoyland, G. ;Elmazria, O. ;Assouar, M.B. ;Alnot, P. ;D'Olieslaeger, M.
- Publisher
- John Wiley and Sons
- Year
- 2002
- Tongue
- English
- Weight
- 248 KB
- Volume
- 193
- Category
- Article
- ISSN
- 0031-8965
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