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Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating

✍ Scribed by Guojun Zhang; Bin Li; Bailing Jiang; Dichun Chen; Fuxue Yan


Book ID
117694940
Publisher
Allerton Press Inc
Year
2010
Tongue
English
Weight
838 KB
Volume
26
Category
Article
ISSN
1005-0302

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Microstructure and mechanical properties
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Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el