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Microstructure and mechanical properties of superhard Ti–B–C–N films deposited by dc unbalanced magnetron sputtering

✍ Scribed by Park, In-Wook; Kim, Kwang Ho; Kunrath, Augusto O.; Zhong, Dalong; Moore, John J.; Voevodin, A. A.; Levashov, E. A.

Book ID
121707571
Publisher
AVS (American Vacuum Society)
Year
2005
Tongue
English
Weight
432 KB
Volume
23
Category
Article
ISSN
0734-211X

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