Mechanical properties of Ti–B–C–N coatings deposited by magnetron sputtering
✍ Scribed by D Zhong; E Sutter; J.J Moore; G.G.W Mustoe; E.A Levashov; J Disam
- Book ID
- 117226612
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 508 KB
- Volume
- 398-399
- Category
- Article
- ISSN
- 0040-6090
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Ti-B-C-N films were deposited by unbalanced DC magnetron sputtering with Ti/B 4 C compound target. The sputtering zone in the surface of the target was adjusted by a magnetic coil. X-ray photoelectron spectrum, X-ray diffraction, nano-indentation and scratch tests were used to analyze the film compo
Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 °C and 500 °C