Properties and performance of new metastable Ti-B-C-N hard coatings prepared by magnetron sputtering
✍ Scribed by M. Stüber; V. Schier; H. Holleck
- Book ID
- 107930530
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 558 KB
- Volume
- 74-75
- Category
- Article
- ISSN
- 0257-8972
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 °C and 500 °C
Cr-Si-N thin films were deposited by pulsed DC reactive dual-magnetron sputtering using Cr and Si targets, while various currents applied to the Si target allowed one to vary the Si content (C Si ) in the films. Microstructure, composition and mechanical properties were studied as a function of C Si