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Composition and oxidation resistance of Ti–B–C and Ti–B–C–N coatings deposited by magnetron sputtering

✍ Scribed by D Zhong; J.J Moore; B.M Mishra; T Ohno; E.A Levashov; J Disam

Book ID
108423126
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
747 KB
Volume
163-164
Category
Article
ISSN
0257-8972

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✍ Guangze Tang; Xinxin Ma; Mingren Sun; Shuyan Xu 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 706 KB

Ti-B-C-N films were deposited by unbalanced DC magnetron sputtering with Ti/B 4 C compound target. The sputtering zone in the surface of the target was adjusted by a magnetic coil. X-ray photoelectron spectrum, X-ray diffraction, nano-indentation and scratch tests were used to analyze the film compo